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Solid SiC

DATA1 Solid SiC

SOLID SiC, which has been developed by our unique technology, is a super high purity SiC made by Chemical Vapor Deposition process.

FEATURES

  • Super High Purity
  • Excellent Chemical Resistance
  • Very Little Metal Diffusion
  • No Outgassing
  • Theoretical Density (-SiC)

APPLICATIONS

  • Wafer Carriers
  • Susceptors, Dummy Wafer
  • Guide Rings
  • Parts for Etching Process
  • CVD Process, etc.

TYPICAL PROPERTIES

Density 3.21 g/cm3  
Electrical Resistivity 102 Ωcm  
Flexural Strength 590 MPa (6000kgf/cm2)
Young's Modulus 450 GPa (46000kgf/mm2)
Vickers Hardness 26 GPa (2650kgf/mm2)
Thermal Conductivity(RT) 250 W/mK  
C.T.E(RT-1000°C) 4.0 ×~10-6/K  

TYPICAL IMPURITIES ANALYSIS

  AI Ca Cr Cu Fe K Na Ni Ti V
ppb 20 16 9 13 31 58 3 6 3 < 1
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