DATA1 Solid SiC
SOLID SiC, which has been developed by our unique technology, is a super high purity SiC made by Chemical Vapor Deposition process.
FEATURES
- Super High Purity
- Excellent Chemical Resistance
- Very Little Metal Diffusion
- No Outgassing
- Theoretical Density (-SiC)
APPLICATIONS
- Wafer Carriers
- Susceptors, Dummy Wafer
- Guide Rings
- Parts for Etching Process
- CVD Process, etc.
TYPICAL PROPERTIES
| Density | 3.21 | g/cm3 | |
|---|---|---|---|
| Electrical Resistivity | 102 | Ωcm | |
| Flexural Strength | 590 | MPa | (6000kgf/cm2) |
| Young's Modulus | 450 | GPa | (46000kgf/mm2) |
| Vickers Hardness | 26 | GPa | (2650kgf/mm2) |
| Thermal Conductivity(RT) | 250 | W/mK | |
| C.T.E(RT-1000°C) | 4.0 | ×~10-6/K |
TYPICAL IMPURITIES ANALYSIS
| AI | Ca | Cr | Cu | Fe | K | Na | Ni | Ti | V | |
|---|---|---|---|---|---|---|---|---|---|---|
| ppb | 20 | 16 | 9 | 13 | 31 | 58 | 3 | 6 | 3 | < 1 |
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