DATA1 SiC COATED GRAPHITE
Conventional CVD SiC coated graphite and newly developed CVI SiC coated graphite are available for various applications upon request.
FEATURES
- Excellent Thermal Shock Resistance
- Excellent Physical Shock Resistance
- Excellent Chemical Resistance
- Super High Purity
- Availability in Complex Shape
- Usable under Oxidizing Atmosphere
APPLICATIONS
- Susceptors for Epitaxy
- Susceptors for CVD
- Heaters
- Components for Crystal Pullers, etc.
TYPICAL PROPERTIES OF BASE GRAPHITE MATERIAL
| Specific Gravity | 1.80 | - |
|---|---|---|
| Electrical Resistivity | 10.5 | μΩm |
| Flexural Strength | 49 | MPa |
| Shore Hardness | 53 | (-) |
| Ash | < 20 | ppm |
| Thermal Conductivity | 120 | W/mK |
For the typical properties and impurity elements of SiC layers, refer to SOLID SiC.
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- TEL
- : 03-3746-5100
