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SiC Coated Graphite

DATA1 SiC COATED GRAPHITE

Conventional CVD SiC coated graphite and newly developed CVI SiC coated graphite are available for various applications upon request.

FEATURES

  • Excellent Thermal Shock Resistance
  • Excellent Physical Shock Resistance
  • Excellent Chemical Resistance
  • Super High Purity
  • Availability in Complex Shape
  • Usable under Oxidizing Atmosphere

APPLICATIONS

  • Susceptors for Epitaxy
  • Susceptors for CVD
  • Heaters
  • Components for Crystal Pullers, etc.

TYPICAL PROPERTIES OF BASE GRAPHITE MATERIAL

Specific Gravity 1.80 -
Electrical Resistivity 10.5 μΩm
Flexural Strength 49 MPa
Shore Hardness 53 (-)
Ash < 20 ppm
Thermal Conductivity 120 W/mK

For the typical properties and impurity elements of SiC layers, refer to SOLID SiC.

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