DATA1 GLASSY CARBON
Glassy Carbon is unique material, which features are Amorphous Structure, No Particle Generation, Gas Impermeability and so on. It has been used in various new applications where conventional Carbon material is inapplicable.
FEATURES
- Low Apparent Density
- Excellent Chemical Resistance
- Gas Impermeability
- High Purity
- Little Particle Generation
- No Outgassing
APPLICATIONS
- Wafer Holders
- Heat Reflectors
- Susceptors
- Guide Rings
- Gas Diffuser Electrodes for Plasma Etching
- Crucibles, Protecting Tubes, etc.
TYPICAL PROPERTIES
| Apparent Density | 1.51 | g/cm3 | |
|---|---|---|---|
| Electrical Resistivity | 42 | μΩm | |
| Flexural Strength | 147 | MPa | (1500 kgf/cm2) |
| Shore Hardness | 120 | (-) | |
| Ash | > 2 | ppm | |
| Thermal Conductivity | 5.8 | W/mK | (5.1 kcal/mhr°C) |
TYPICAL IMPURITIES ANALYSIS
| AI | Ca | Cr | Cu | Fe | K | Na | Ni | Ti | V | |
|---|---|---|---|---|---|---|---|---|---|---|
| ppm | < 0.08 | < 0.04 | < 0.07 | < 0.08 | < 0.04 | < 0.1 | < 0.05 | < 0.1 | < 0.09 | < 0.07 |
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