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Glassy Carbon


DATA1 GLASSY CARBON

Glassy Carbon is unique material, which features are Amorphous Structure, No Particle Generation, Gas Impermeability and so on. It has been used in various new applications where conventional Carbon material is inapplicable.

FEATURES

  • Low Apparent Density
  • Excellent Chemical Resistance
  • Gas Impermeability
  • High Purity
  • Little Particle Generation
  • No Outgassing

APPLICATIONS

  • Wafer Holders
  • Heat Reflectors
  • Susceptors
  • Guide Rings
  • Gas Diffuser Electrodes for Plasma Etching
  • Crucibles, Protecting Tubes, etc.

TYPICAL PROPERTIES

Apparent Density 1.51 g/cm3  
Electrical Resistivity 42 μΩm  
Flexural Strength 147 MPa (1500 kgf/cm2)
Shore Hardness 120 (-)  
Ash > 2 ppm  
Thermal Conductivity 5.8 W/mK (5.1 kcal/mhr°C)

TYPICAL IMPURITIES ANALYSIS

  AI Ca Cr Cu Fe K Na Ni Ti V
ppm < 0.08 < 0.04 < 0.07 < 0.08 < 0.04 < 0.1 < 0.05 < 0.1 < 0.09 < 0.07
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